Assignee

SHIN JAW-JUNG

TW·2 granted patents·151 citations·filing 2011–2012

Technology mixG03F2 B82Y1 G06F1 H01J1 Y10S1

Top patents by PatentIndex Score

2 records

0198US8762900B2Method for proximity correctionSHIN JAW-JUNG·Filed 2012·Granted Jun 24, 2014·121 cites·13 claims
0296US8524427B2Electron beam lithography system and method for improving throughputSHIN JAW-JUNG·Filed 2011·Granted Sep 3, 2013·30 cites·20 claims

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