Assignee
SHINOZAKI HIROYUKI
JP·3 granted patents·36 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0194US9156122B2Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatusSHINOZAKI HIROYUKI·Filed 2012·Granted Oct 13, 2015·18 cites·38 claims
- 0294US8517796B2Dressing apparatus, dressing method, and polishing apparatusSHINOZAKI HIROYUKI·Filed 2010·Granted Aug 27, 2013·16 cites·11 claims
- 0369US8807914B2Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamberSHINOZAKI HIROYUKI·Filed 2008·Granted Aug 19, 2014·2 cites·7 claims
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