Assignee
SHIRAI SEIICHIRO
JP·1 granted patent·1 pending application·1 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0159US8557611B2Manufacturing method of semiconductor device, exposure method, and exposure apparatusSHIRAI SEIICHIRO·Filed 2011·Granted Oct 15, 2013·1 cites·23 claims
- 0230US2012156623A1Semiconductor device manufacturing method, exposure method for exposure apparatus, exposure apparatus, and light source for exposure apparatusSHIRAI SEIICHIRO·Filed 2011·Application pending·0 cites
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