Assignee
SHIRAISHI KENICHI
JP·10 granted patents·1 pending application·27 citations·filing 2005–2012
Top patents by PatentIndex Score
11 records- 0188US8525971B2Lithographic apparatus with cleaning of substrate tableSHIRAISHI KENICHI·Filed 2007·Granted Sep 3, 2013·6 cites·25 claims
- 0287US8520184B2Immersion exposure apparatus and device manufacturing method with measuring deviceSHIRAISHI KENICHI·Filed 2005·Granted Aug 27, 2013·6 cites·41 claims
- 0384US8064039B2Exposure method, exposure apparatus, and device manufacturing methodSHIRAISHI KENICHI·Filed 2006·Granted Nov 22, 2011·6 cites·32 claims
- 0483US8704997B2Immersion lithographic apparatus and method for rinsing immersion space before exposureSHIRAISHI KENICHI·Filed 2008·Granted Apr 22, 2014·4 cites·21 claims
- 0572US8115902B2Exposure apparatus, device manufacturing method, maintenance method, and exposure methodSHIRAISHI KENICHI·Filed 2009·Granted Feb 14, 2012·2 cites·28 claims
- 0671US8236467B2Exposure method, exposure apparatus, and device manufacturing methodSHIRAISHI KENICHI·Filed 2006·Granted Aug 7, 2012·2 cites·34 claims
- 0762US8638422B2Exposure method, exposure apparatus, method for producing device, and method for evaluating exposure apparatusSHIRAISHI KENICHI·Filed 2006·Granted Jan 28, 2014·1 cites·60 claims
- 0856US8941812B2Exposure method, exposure apparatus, and device manufacturing methodSHIRAISHI KENICHI·Filed 2012·Granted Jan 27, 2015·0 cites·28 claims
- 0955US9335639B2Exposure method, exposure apparatus, and device manufacturing methodSHIRAISHI KENICHI·Filed 2011·Granted May 10, 2016·0 cites·18 claims
- 1049US8654306B2Exposure apparatus, cleaning method, and device fabricating methodSHIRAISHI KENICHI·Filed 2009·Granted Feb 18, 2014·0 cites·38 claims
- 1145US2009153813A1Exposure Method, Exposure Apparatus and Method for Fabricating DeviceSHIRAISHI KENICHI·Filed 2007·Application pending·0 cites
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