Assignee

SHISHIDO HIROAKI

JP·2 granted patents·0 citations·filing 2010–2012

Technology mixB32B1 C03C1 G01J1 G01N1 G02B1 G03F1

Top patents by PatentIndex Score

2 records

0154US8553214B2Method and equipment for detecting pattern defectSHISHIDO HIROAKI·Filed 2010·Granted Oct 8, 2013·0 cites·7 claims
0249US8846274B2Mask blank, transfer mask and process for manufacturing semiconductor devicesSHISHIDO HIROAKI·Filed 2012·Granted Sep 30, 2014·0 cites·18 claims

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