Assignee
SHOKI TSUTOMU
JP·2 granted patents·10 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0187US8512918B2Multilayer reflective film coated substrate for a reflective mask, reflective mask blank, and methods of manufacturing the sameSHOKI TSUTOMU·Filed 2010·Granted Aug 20, 2013·10 cites·24 claims
- 0251US8399160B2Multilayer reflective film coated substrate, reflective mask blank, and method of manufacturing a reflective maskSHOKI TSUTOMU·Filed 2009·Granted Mar 19, 2013·0 cites·9 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →