Assignee
SIGEL BENJAMIN
DE·2 granted patents·1 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0160US9030644B2Projection exposure apparatus for semiconductor lithography including an actuator systemSIGEL BENJAMIN·Filed 2011·Granted May 12, 2015·1 cites·25 claims
- 0232US9964673B2Optical system with aperture device having plurality of aperture elementsSIGEL BENJAMIN·Filed 2011·Granted May 8, 2018·0 cites·3 claims
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