Assignee
SILICON MICROSTRUCTURES INC
US·22 granted patents·6 pending applications·294 citations·filing 1998–2020
Top patents by PatentIndex Score
28 records- 0195US7111518B1Extremely low cost pressure sensor realized using deep reactive ion etchingSILICON MICROSTRUCTURES INC·Filed 2003·Granted Sep 26, 2006·66 cites·25 claims
- 0291US7487681B1Pressure sensor adjustment using backside maskSILICON MICROSTRUCTURES INC·Filed 2007·Granted Feb 10, 2009·23 cites·28 claims
- 0391US6150681AMonolithic flow sensor and pressure sensorSILICON MICROSTRUCTURES INC·Filed 1998·Granted Nov 21, 2000·79 cites·10 claims
- 0487US10641672B2Manufacturing catheter sensorsSILICON MICROSTRUCTURES INC·Filed 2016·Granted May 5, 2020·5 cites·27 claims
- 0587US8866241B2Pressure sensing device having contacts opposite a membraneSILICON MICROSTRUCTURES INC·Filed 2012·Granted Oct 21, 2014·7 cites·23 claims
- 0686US11473991B2Low-pressure sensor with stiffening ribsSILICON MICROSTRUCTURES INC·Filed 2019·Granted Oct 18, 2022·4 cites·9 claims
- 0785US6467354B1Anodically bonded, gas impervious cavity structures fabricated in siliconSILICON MICROSTRUCTURES INC·Filed 2000·Granted Oct 22, 2002·30 cites·20 claims
- 0881US10041851B2Manufacturing catheter sensorsSILICON MICROSTRUCTURES INC·Filed 2016·Granted Aug 7, 2018·3 cites·28 claims
- 0980US8381596B2CMOS compatible pressure sensor for low pressuresSILICON MICROSTRUCTURES INC·Filed 2010·Granted Feb 26, 2013·12 cites·24 claims
- 1080US6093579ALow pressure sensor with a thin boss and method of manufactureSILICON MICROSTRUCTURES INC·Filed 1998·Granted Jul 25, 2000·45 cites·11 claims
- 1178US11604110B2Leadless pressure sensorSILICON MICROSTRUCTURES INC·Filed 2020·Granted Mar 14, 2023·1 cites·13 claims
- 1278US10655989B2Pressure sensor cap having flow path with dimension variationSILICON MICROSTRUCTURES INC·Filed 2018·Granted May 19, 2020·2 cites·20 claims
- 1359US11268839B2Resistive flow sensorSILICON MICROSTRUCTURES INC·Filed 2020·Granted Mar 8, 2022·0 cites·11 claims
- 1455US11877864B2Voltage nulling pressure sensor preampSILICON MICROSTRUCTURES INC·Filed 2019·Granted Jan 23, 2024·0 cites·20 claims
- 1554US12115327B2Sensor device and methods of operation for a catheter based treatment of myocardial microvascular obstructionSILICON MICROSTRUCTURES INC·Filed 2020·Granted Oct 15, 2024·0 cites·14 claims
- 1654US10682498B2Light shields for catheter sensorsSILICON MICROSTRUCTURES INC·Filed 2017·Granted Jun 16, 2020·0 cites·22 claims
- 1752US11060929B2Pressure sensor die attachSILICON MICROSTRUCTURES INC·Filed 2019·Granted Jul 13, 2021·0 cites·16 claims
- 1851US9733139B2Vertical membranes for pressure sensing applicationsSILICON MICROSTRUCTURES INC·Filed 2014·Granted Aug 15, 2017·1 cites·10 claims
- 1951US8820169B2Compensation of stress effects on pressure sensor componentsSILICON MICROSTRUCTURES INC·Filed 2013·Granted Sep 2, 2014·0 cites·38 claims
- 2042US2013008255A1Temperature extraction from a pressure sensorSILICON MICROSTRUCTURES INC·Filed 2011·Application pending·0 cites
- 2141US6107170ASilicon sensor contact with platinum silicide, titanium/tungsten and goldSILICON MICROSTRUCTURES INC·Filed 1998·Granted Aug 22, 2000·9 cites·7 claims
- 2240US2014260650A1Silicon plate in plastic packageSILICON MICROSTRUCTURES INC·Filed 2013·Application pending·0 cites
- 2339US2015143926A1Area-efficient pressure sensing deviceSILICON MICROSTRUCTURES INC·Filed 2013·Application pending·0 cites
- 2438US6089099AMethod for forming a bonded silicon-glass pressure sensor with strengthened cornersSILICON MICROSTRUCTURES INC·Filed 1998·Granted Jul 18, 2000·7 cites·6 claims
- 2537US11454561B23D contact force sensingSILICON MICROSTRUCTURES INC·Filed 2019·Granted Sep 27, 2022·0 cites·20 claims
- 2634US2016178467A1Pressure sensor having cap-defined membraneSILICON MICROSTRUCTURES INC·Filed 2016·Application pending·0 cites
- 2732US2016033349A1Pressure sensor having cap-defined membraneSILICON MICROSTRUCTURES INC·Filed 2015·Application pending·0 cites
- 2819US2015198496A1Pressure testing with controlled applied fluidSILICON MICROSTRUCTURES INC·Filed 2014·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →