Assignee
SILTEC CORP
9 patents
Top patents by PatentIndex Score
US4132037AJan 2, 1979
Apparatus for polishing semiconductor wafers
SILTEC CORP59 citations96
US4194324AMar 25, 1980
Semiconductor wafer polishing machine and wafer carrier therefor
SILTEC CORP86 citations95
US4918870AApr 24, 1990
Floating subcarriers for wafer polishing apparatus
SILTEC CORP124 citations93
US4458152AJul 3, 1984
Precision specular proximity detector and article handing apparatus employing same
SILTEC CORP52 citations92
US4036595AJul 19, 1977
Continuous crystal growing furnace
SILTEC CORP95 citations92
US4454096AJun 12, 1984
Crystal growth furnace recharge
SILTEC CORP53 citations91
US4282184AAug 4, 1981
Continuous replenishment of molten semiconductor in a Czochralski-process, single-crystal-growing furnace
SILTEC CORP62 citations90
US4410494AOct 18, 1983
Apparatus for controlling flow of molten material between crystal growth furnaces and a replenishment crucible
SILTEC CORP34 citations88
US4396824AAug 2, 1983
Conduit for high temperature transfer of molten semiconductor crystalline material
SILTEC CORP31 citations87