Assignee
SILTRON INC
KR33 patents
Top patents by PatentIndex Score
US6884694B2Apr 26, 2005
Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same
SILTRON INC52 citations96
US6527859B2Mar 4, 2003
Apparatus for growing a single crystalline ingot
SILTRON INC24 citations91
US7559988B2Jul 14, 2009
Method and apparatus for growing high quality silicon single crystal, silicon single crystal ingot grown thereby and wafer produced from the same single crystal ingot
SILTRON INC9 citations83
US7615470B2Nov 10, 2009
Method of manufacturing gallium nitride semiconductor
SILTRON INC7 citations73
US6521316B2Feb 18, 2003
single crystalline silicon wafer, ingot, and producing method thereof
SILTRON INC11 citations72
US7242075B2Jul 10, 2007
Silicon wafers and method of fabricating the same
SILTRON INC9 citations71
US6818569B2Nov 16, 2004
Method of fabricating annealed wafer
SILTRON INC8 citations70
US7261099B2Aug 28, 2007
Apparatus and method for slicing an ingot
SILTRON INC8 citations68
US7723217B2May 25, 2010
Method for manufacturing gallium nitride single crystalline substrate using self-split
SILTRON INC4 citations62
US7708832B2May 4, 2010
Method for preparing substrate for growing gallium nitride and method for preparing gallium nitride substrate
SILTRON INC6 citations62
US6574264B2Jun 3, 2003
Apparatus for growing a silicon ingot
SILTRON INC5 citations62
US7608145B2Oct 27, 2009
Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby
SILTRON INC3 citations61
US7416603B2Aug 26, 2008
High quality single crystal and method of growing the same
SILTRON INC6 citations61
US7371283B2May 13, 2008
Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby
SILTRON INC4 citations61
US6858077B2Feb 22, 2005
Single crystalline silicon wafer, ingot, and producing method thereof
SILTRON INC5 citations61
US7799130B2Sep 21, 2010
Silicon single crystal ingot and wafer, growing apparatus and method thereof
SILTRON INC2 citations59
US7125608B2Oct 24, 2006
Single-crystal silicon ingot and wafer having homogeneous vacancy defects, and method and apparatus for making same
SILTRON INC3 citations59
US7353818B2Apr 8, 2008
Apparatus and method for slicing an ingot
SILTRON INC2 citations57
US7326292B2Feb 5, 2008
Quality evaluation method for single crystal ingot
SILTRON INC5 citations57
US7816241B2Oct 19, 2010
Method for preparing compound semiconductor substrate
SILTRON INC1 citations52
US7915698B2Mar 29, 2011
Nitride semiconductor substrate having a base substrate with parallel trenches
SILTRON INC0 citations51
US7427325B2Sep 23, 2008
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby
SILTRON INC0 citations51
US6899760B2May 31, 2005
Silicon single crystal growing furnace supplemented with low melting point dopant feeding instrument and the low melting point dopant feeding method thereof
SILTRON INC4 citations51
US8349075B2Jan 8, 2013
2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
SILTRON INC1 citations47
US7229495B2Jun 12, 2007
Silicon wafer and method for producing silicon single crystal
SILTRON INC0 citations47
US7431028B2Oct 7, 2008
Apparatus and method for slicing an ingot
SILTRON INC0 citations46
US7370646B2May 13, 2008
Apparatus and method for slicing an ingot
SILTRON INC0 citations46
US7378071B2May 27, 2008
Silicon wafer and method for producing silicon single crystal
SILTRON INC1 citations44
US7767596B2Aug 3, 2010
Wafer support pin for preventing slip dislocation during annealing of water and wafer annealing method using the same
SILTRON INC0 citations42
US6743472B2Jun 1, 2004
Coating material for absorbing radiant heat, manufacturing method thereof
SILTRON INC1 citations39
US7906408B2Mar 15, 2011
Method of manufacturing strained silicon on-insulator substrate
SILTRON INC0 citations37
US7976642B2Jul 12, 2011
Box cleaner for cleaning wafer shipping box
SILTRON INC0 citations32
US7901132B2Mar 8, 2011
Method of identifying crystal defect region in monocrystalline silicon using metal contamination and heat treatment
SILTRON INC0 citations27