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SIMPLUS SYSTEMS CORP
US14 patents
Top patents by PatentIndex Score
US6689220B1Feb 10, 2004
Plasma enhanced pulsed layer deposition
SIMPLUS SYSTEMS CORP658 citations99
US6565661B1May 20, 2003
High flow conductance and high thermal conductance showerhead system and method
SIMPLUS SYSTEMS CORP307 citations99
US6444039B1Sep 3, 2002
Three-dimensional showerhead apparatus
SIMPLUS SYSTEMS CORP326 citations99
US6777331B2Aug 17, 2004
Multilayered copper structure for improving adhesion property
SIMPLUS SYSTEMS CORP67 citations96
US6495449B1Dec 17, 2002
Multilayered diffusion barrier structure for improving adhesion property
SIMPLUS SYSTEMS CORP38 citations93
US6440219B1Aug 27, 2002
Replaceable shielding apparatus
SIMPLUS SYSTEMS CORP19 citations93
US6610169B2Aug 26, 2003
Semiconductor processing system and method
SIMPLUS SYSTEMS CORP29 citations92
US6572706B1Jun 3, 2003
Integrated precursor delivery system
SIMPLUS SYSTEMS CORP39 citations92
US6221166B1Apr 24, 2001
Multi-thermal zone shielding apparatus
SIMPLUS SYSTEMS CORP18 citations92
US6488272B1Dec 3, 2002
Liquid delivery system emulsifier
SIMPLUS SYSTEMS CORP16 citations84
US6670266B2Dec 30, 2003
Multilayered diffusion barrier structure for improving adhesion property
SIMPLUS SYSTEMS CORP10 citations74
US6641672B2Nov 4, 2003
Replaceable shielding apparatus
SIMPLUS SYSTEMS CORP6 citations74
US6572707B1Jun 3, 2003
Vaporizer for sensitive precursors
SIMPLUS SYSTEMS CORP8 citations74
US6609632B2Aug 26, 2003
Removable lid and floating pivot
SIMPLUS SYSTEMS CORP2 citations62