Assignee
SIMULATION PHYSICS INC
3 patents
Top patents by PatentIndex Score
US4082958AApr 4, 1978
Apparatus involving pulsed electron beam processing of semiconductor devices
SIMULATION PHYSICS INC21 citations81
US3950187AApr 13, 1976
Method and apparatus involving pulsed electron beam processing of semiconductor devices
SIMULATION PHYSICS INC19 citations81
US4079285AMar 14, 1978
Dielectric guide for electron beam transport
SIMULATION PHYSICS INC7 citations73