Assignee
SISCAN SYSTEMS INC
US5 patents
Top patents by PatentIndex Score
US5184021AFeb 2, 1993
Method and apparatus for measuring the dimensions of patterned features on a lithographic photomask
SISCAN SYSTEMS INC53 citations96
US4748335AMay 31, 1988
Method and aparatus for determining surface profiles
SISCAN SYSTEMS INC70 citations95
US4707610ANov 17, 1987
Method and apparatus for measuring surface profiles
SISCAN SYSTEMS INC45 citations91
US4634880AJan 6, 1987
Confocal optical imaging system with improved signal-to-noise ratio
SISCAN SYSTEMS INC45 citations91
US4847823AJul 11, 1989
Method and apparatus for reading or measuring magneto-optical storage media using pinhole aperture
SISCAN SYSTEMS INC13 citations72