Assignee
SIVAKUMAR SWAMINATHAN
US·1 granted patent·4 pending applications·4 citations·filing 2005–2011
Top patents by PatentIndex Score
5 records- 0174US8860184B2Spacer assisted pitch division lithographySIVAKUMAR SWAMINATHAN·Filed 2011·Granted Oct 14, 2014·4 cites·20 claims
- 0239US2009263751A1Methods for double patterning photoresistSIVAKUMAR SWAMINATHAN·Filed 2008·Application pending·0 cites
- 0337US2007231748A1Patterning trenches in a photoresist layer with tight end-to-end separationSIVAKUMAR SWAMINATHAN·Filed 2006·Application pending·0 cites
- 0434US2005263899A1Photoresist process to enable sloped passivation bondpad openings for ease of metal step coveringsSIVAKUMAR SWAMINATHAN·Filed 2005·Application pending·0 cites
- 0532US2007218685A1Method of forming trench contacts for MOS transistorsSIVAKUMAR SWAMINATHAN·Filed 2006·Application pending·0 cites
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