Assignee
SIVARAMAKRISHNAN VISWESWAREN
US·3 granted patents·21 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0195US8673081B2High throughput multi-wafer epitaxial reactorSIVARAMAKRISHNAN VISWESWAREN·Filed 2010·Granted Mar 18, 2014·11 cites·26 claims
- 0286US8298629B2High throughput multi-wafer epitaxial reactorSIVARAMAKRISHNAN VISWESWAREN·Filed 2009·Granted Oct 30, 2012·5 cites·48 claims
- 0383US9255346B2Silicon wafers by epitaxial depositionSIVARAMAKRISHNAN VISWESWAREN·Filed 2012·Granted Feb 9, 2016·5 cites·19 claims
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