Assignee
SIX STEPHAN
DE3 patents
Top patents by PatentIndex Score
US8279402B2Oct 2, 2012
Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same
SIX STEPHAN11 citations76
US8934079B2Jan 13, 2015
Optical imaging with reduced immersion liquid evaporation effects
SIX STEPHAN2 citations59
US8564925B2Oct 22, 2013
Wafer chuck for EUV lithography
SIX STEPHAN3 citations59