Individual holder
SMIRNOV ALEXEI V
US·10 granted patents·92 citations·filing 2009–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
10 records- 0195US9027585B2Adaptive pressure insensitive mass flow controller and method for multi-gas applicationsSMIRNOV ALEXEI V·Filed 2011·Granted May 12, 2015·28 cites·11 claims
- 0292US8915262B2Mass flow controller algorithm with adaptive valve start positionSMIRNOV ALEXEI V·Filed 2011·Granted Dec 23, 2014·17 cites·10 claims
- 0384US9256228B2Mass flow controller with onboard diagnostics, prognostics, and data loggingSMIRNOV ALEXEI V·Filed 2012·Granted Feb 9, 2016·9 cites·12 claims
- 0483US8504311B2Method and mass flow controller for enhanced operating rangeSMIRNOV ALEXEI V·Filed 2010·Granted Aug 6, 2013·7 cites·7 claims
- 0583US8131400B2Adaptive on-tool mass flow controller tuningSMIRNOV ALEXEI V·Filed 2010·Granted Mar 6, 2012·11 cites·18 claims
- 0672US8321060B2Method and system of on-tool and on-site MFC optimization providing consistent responseSMIRNOV ALEXEI V·Filed 2010·Granted Nov 27, 2012·9 cites·21 claims
- 0771US8196601B2Thermal flow sensor with zero drift compensationSMIRNOV ALEXEI V·Filed 2009·Granted Jun 12, 2012·7 cites·20 claims
- 0852US8160833B2Thermal mass flow sensor with improved response across fluid typesSMIRNOV ALEXEI V·Filed 2009·Granted Apr 17, 2012·2 cites·21 claims
- 0950US8195312B2Multi-mode control loop with improved performance for mass flow controllerSMIRNOV ALEXEI V·Filed 2009·Granted Jun 5, 2012·2 cites·17 claims
- 1045US8671973B2Mass flow controller hysteresis compensation system and methodSMIRNOV ALEXEI V·Filed 2009·Granted Mar 18, 2014·0 cites·4 claims
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