Individual holder
SMIRNOV STANISLAV Y
US·5 granted patents·4 citations·filing 2009–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0173US9285687B2Inspection apparatus, lithographic apparatus, and device manufacturing methodSMIRNOV STANISLAV Y·Filed 2012·Granted Mar 15, 2016·2 cites·21 claims
- 0268US8634064B2Optical system for increasing illumination efficiency of a patterning device by producing a plurality of beamsSMIRNOV STANISLAV Y·Filed 2010·Granted Jan 21, 2014·1 cites·8 claims
- 0362US8064148B2High numerical aperture catadioptric objectives without obscuration and applications thereofSMIRNOV STANISLAV Y·Filed 2009·Granted Nov 22, 2011·1 cites·17 claims
- 0453US8259398B2High numerical aperture catadioptric objectives without obscuration and applications thereofSMIRNOV STANISLAV Y·Filed 2011·Granted Sep 4, 2012·0 cites·21 claims
- 0552US9069260B2Catadioptric illumination system for metrologySMIRNOV STANISLAV Y·Filed 2011·Granted Jun 30, 2015·0 cites·20 claims
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