Assignee

SOCHA ROBERT

US2 patents

Top patents by PatentIndex Score

US8730452B2May 20, 2014

Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders

SOCHA ROBERT5 citations79

US8395757B2Mar 12, 2013

Optimized polarization illumination

SOCHA ROBERT1 citations58