Assignee

SOEDA YASUHIRO

JP·1 granted patent·38 citations·filing 2009–2009

Technology mixB06B1 G01S1 Y10T1

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0183US8665672B2Process for producing capacitive electromechanical conversion device, and capacitive electromechanical conversion deviceSOEDA YASUHIRO·Filed 2009·Granted Mar 4, 2014·38 cites·10 claims

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