Assignee
SOER WOUTER ANTHON
NL·11 granted patents·1 pending application·14 citations·filing 2007–2012
Top patents by PatentIndex Score
12 records- 0183US9041912B2Spectral purity filters for use in a lithographic apparatusSOER WOUTER ANTHON·Filed 2012·Granted May 26, 2015·3 cites·13 claims
- 0277US8227771B2Debris prevention system and lithographic apparatusSOER WOUTER ANTHON·Filed 2007·Granted Jul 24, 2012·3 cites·20 claims
- 0369US9195152B2Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterSOER WOUTER ANTHON·Filed 2009·Granted Nov 24, 2015·3 cites·6 claims
- 0465US8263950B2Radiation sourceSOER WOUTER ANTHON·Filed 2010·Granted Sep 11, 2012·2 cites·15 claims
- 0563US8120752B2Lithographic apparatusSOER WOUTER ANTHON·Filed 2009·Granted Feb 21, 2012·2 cites·4 claims
- 0653US8836917B2Zone plateSOER WOUTER ANTHON·Filed 2012·Granted Sep 16, 2014·0 cites·10 claims
- 0752US8289499B2Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured therebySOER WOUTER ANTHON·Filed 2009·Granted Oct 16, 2012·0 cites·23 claims
- 0851US8390788B2Spectral purity filters for use in a lithographic apparatusSOER WOUTER ANTHON·Filed 2009·Granted Mar 5, 2013·0 cites·13 claims
- 0946US8242471B2Radiation source and lithographic apparatus including a contamination trapSOER WOUTER ANTHON·Filed 2009·Granted Aug 14, 2012·1 cites·11 claims
- 1045US9726989B2Spectral purity filterSOER WOUTER ANTHON·Filed 2011·Granted Aug 8, 2017·0 cites·2 claims
- 1144US8817237B2Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterSOER WOUTER ANTHON·Filed 2010·Granted Aug 26, 2014·0 cites·12 claims
- 1239US2012154779A1Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterSOER WOUTER ANTHON·Filed 2010·Application pending·0 cites
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