Assignee
SOFIN MIKHAIL
DE2 patents
Top patents by PatentIndex Score
US9534290B2Jan 3, 2017
Apparatus for deposition of polycrystalline silicon comprising uniformly spaced filament rods and gas inlet orifices, and process for deposition of polycrystalline silicon using same
SOFIN MIKHAIL0 citations42
US9382617B2Jul 5, 2016
Rod-type polysilicon having improved breaking properties
SOFIN MIKHAIL0 citations42