Assignee
SOGARD MICHAEL
US4 patents
Top patents by PatentIndex Score
US8994918B2Mar 31, 2015
Apparatus and methods for measuring thermally induced reticle distortion
SOGARD MICHAEL7 citations83
US8711335B2Apr 29, 2014
Stroboscopic light source for a transmitter of a large scale metrology system
SOGARD MICHAEL2 citations61
US8852858B2Oct 7, 2014
Methods and devices for hybridization and binding assays using thermophoresis
SOGARD MICHAEL1 citations51
US8194229B2Jun 5, 2012
Dynamic fluid control system for immersion lithography
SOGARD MICHAEL0 citations51