Assignee
SOHDA YASUNARI
JP·5 granted patents·8 citations·filing 2010–2011
Top patents by PatentIndex Score
5 records- 0178US8704175B2Scanning electron microscopeSOHDA YASUNARI·Filed 2011·Granted Apr 22, 2014·4 cites·14 claims
- 0273US8735814B2Electron beam deviceSOHDA YASUNARI·Filed 2011·Granted May 27, 2014·3 cites·16 claims
- 0361US8637820B2Scanning electron microscope and inspection method using sameSOHDA YASUNARI·Filed 2011·Granted Jan 28, 2014·1 cites·19 claims
- 0448US8575547B2Electron beam measurement apparatusSOHDA YASUNARI·Filed 2010·Granted Nov 5, 2013·0 cites·2 claims
- 0542US8816277B2Pattern evaluation method, device therefor, and electron beam deviceSOHDA YASUNARI·Filed 2010·Granted Aug 26, 2014·0 cites·22 claims
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