Assignee
SOLID STATE MEASUREMENTS INC
US·35 granted patents·2 pending applications·709 citations·filing 1975–2007
Top patents by PatentIndex Score
37 records- 0197US6900652B2Flexible membrane probe and method of use thereofSOLID STATE MEASUREMENTS INC·Filed 2003·Granted May 31, 2005·126 cites·16 claims
- 0295US7023231B2Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereofSOLID STATE MEASUREMENTS INC·Filed 2004·Granted Apr 4, 2006·112 cites·20 claims
- 0391US6492827B1Non-invasive electrical measurement of semiconductor wafersSOLID STATE MEASUREMENTS INC·Filed 2000·Granted Dec 10, 2002·60 cites·18 claims
- 0489US6052653ASpreading resistance profiling systemSOLID STATE MEASUREMENTS INC·Filed 1997·Granted Apr 18, 2000·110 cites·14 claims
- 0587US7285963B2Method and system for measurement of dielectric constant of thin films using a near field microwave probeSOLID STATE MEASUREMENTS INC·Filed 2005·Granted Oct 23, 2007·19 cites·20 claims
- 0681US6842029B2Non-invasive electrical measurement of semiconductor wafersSOLID STATE MEASUREMENTS INC·Filed 2002·Granted Jan 11, 2005·30 cites·17 claims
- 0780US5023561AApparatus and method for non-invasive measurement of electrical properties of a dielectric layer in a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 1990·Granted Jun 11, 1991·49 cites·9 claims
- 0880US3978622ALapping and polishing apparatusSOLID STATE MEASUREMENTS INC·Filed 1975·Granted Sep 7, 1976·20 cites·7 claims
- 0973US6632691B1Apparatus and method for determining doping concentration of a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2002·Granted Oct 14, 2003·15 cites·8 claims
- 1071US6741093B2Method of determining one or more properties of a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2002·Granted May 25, 2004·15 cites·19 claims
- 1170US6788076B2Apparatus for determining doping concentration of a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2003·Granted Sep 7, 2004·13 cites·8 claims
- 1270US5036271AApparatus for characterization of electrical properties of a semiconductor bodySOLID STATE MEASUREMENTS INC·Filed 1990·Granted Jul 30, 1991·37 cites·5 claims
- 1367US6851096B2Method and apparatus for testing semiconductor wafersSOLID STATE MEASUREMENTS INC·Filed 2002·Granted Feb 1, 2005·11 cites·15 claims
- 1462US7362108B2Method and system for measurement of sidewall damage in etched dielectric structures using a near field microwave probeSOLID STATE MEASUREMENTS INC·Filed 2005·Granted Apr 22, 2008·2 cites·20 claims
- 1561US4090132AMeasurement of excess carrier lifetime in semiconductor devicesSOLID STATE MEASUREMENTS INC·Filed 1976·Granted May 16, 1978·13 cites·12 claims
- 1660US6991948B2Method of electrical characterization of a silicon-on-insulator (SOI) waferSOLID STATE MEASUREMENTS INC·Filed 2003·Granted Jan 31, 2006·9 cites·15 claims
- 1759US7327155B2Elastic metal gate MOS transistor for surface mobility measurement in semiconductor materialsSOLID STATE MEASUREMENTS INC·Filed 2005·Granted Feb 5, 2008·3 cites·11 claims
- 1858US6972582B2Apparatus and method for measuring semiconductor wafer electrical propertiesSOLID STATE MEASUREMENTS INC·Filed 2003·Granted Dec 6, 2005·8 cites·16 claims
- 1957US6836139B2Method and apparatus for determining defect and impurity concentration in semiconducting material of a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2002·Granted Dec 28, 2004·8 cites·20 claims
- 2055US7295022B2Method and system for automatically determining electrical properties of a semiconductor wafer or sampleSOLID STATE MEASUREMENTS INC·Filed 2005·Granted Nov 13, 2007·4 cites·16 claims
- 2155US6657454B2High speed threshold voltage and average surface doping measurementsSOLID STATE MEASUREMENTS INC·Filed 2002·Granted Dec 2, 2003·7 cites·3 claims
- 2251US7250313B2Method of detecting un-annealed ion implantsSOLID STATE MEASUREMENTS INC·Filed 2004·Granted Jul 31, 2007·3 cites·21 claims
- 2349US6803780B2Sample chuck with compound constructionSOLID STATE MEASUREMENTS INC·Filed 2002·Granted Oct 12, 2004·2 cites·9 claims
- 2448US6879176B1Conductance-voltage (GV) based method for determining leakage current in dielectricsSOLID STATE MEASUREMENTS INC·Filed 2003·Granted Apr 12, 2005·4 cites·15 claims
- 2547US6894519B2Apparatus and method for determining electrical properties of a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2002·Granted May 17, 2005·4 cites·26 claims
- 2646US7005307B2Apparatus and method for detecting soft breakdown of a dielectric layer of a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2004·Granted Feb 28, 2006·3 cites·18 claims
- 2745US6150832ANoncontact capacitance measuring deviceSOLID STATE MEASUREMENTS INC·Filed 1999·Granted Nov 21, 2000·12 cites·8 claims
- 2844US7063992B2Semiconductor substrate surface preparation using high temperature convection heatingSOLID STATE MEASUREMENTS INC·Filed 2003·Granted Jun 20, 2006·1 cites·11 claims
- 2944US2008290889A1Method of destructive testing the dielectric layer of a semiconductor wafer or sampleSOLID STATE MEASUREMENTS INC·Filed 2007·Application pending·0 cites
- 3041US7037734B2Method and apparatus for determining generation lifetime of product semiconductor wafersSOLID STATE MEASUREMENTS INC·Filed 2004·Granted May 2, 2006·1 cites·17 claims
- 3140US7007408B2Method and apparatus for removing and/or preventing surface contamination of a probeSOLID STATE MEASUREMENTS INC·Filed 2004·Granted Mar 7, 2006·2 cites·29 claims
- 3240US4489521AApparatus for abrading workpieces, particularly semiconductor wafersSOLID STATE MEASUREMENTS INC·Filed 1982·Granted Dec 25, 1984·4 cites·7 claims
- 3339US7282941B2Method of measuring semiconductor wafers with an oxide enhanced probeSOLID STATE MEASUREMENTS INC·Filed 2005·Granted Oct 16, 2007·0 cites·14 claims
- 3435US7304490B2In-situ wafer and probe desorption using closed loop heatingSOLID STATE MEASUREMENTS INC·Filed 2004·Granted Dec 4, 2007·1 cites·19 claims
- 3535US7190186B2Method and apparatus for determining concentration of defects and/or impurities in a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2004·Granted Mar 13, 2007·1 cites·19 claims
- 3633US2005225345A1Method of testing semiconductor wafers with non-penetrating probesSOLID STATE MEASUREMENTS INC·Filed 2005·Application pending·0 cites
- 3726US7026837B2Method and apparatus for determining the dielectric constant of a low permittivity dielectric on a semiconductor waferSOLID STATE MEASUREMENTS INC·Filed 2003·Granted Apr 11, 2006·0 cites·15 claims
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