Assignee

SOLMICS CO LID

KR·1 granted patent·1 citations·filing 2022–2022

Technology mixC04B1 H01J1 H01L1 H10P1

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0166US12428347B2Ceramic component and plasma etching apparatus comprising sameSOLMICS CO LID·Filed 2022·Granted Sep 30, 2025·1 cites·19 claims

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