Assignee
SON HYOUNG KYU
KR·2 granted patents·1 pending application·6 citations·filing 2007–2008
Top patents by PatentIndex Score
3 records- 0174US8623173B2Substrate processing apparatus having electrode memberSON HYOUNG-KYU·Filed 2008·Granted Jan 7, 2014·6 cites·4 claims
- 0247US2008108154A1Apparatus and method for measuring chuck attachment forceSON HYOUNG KYU·Filed 2007·Application pending·0 cites
- 0341US8834673B2Process chamber having gate slit opening and closing apparatusSON HYOUNG KYU·Filed 2007·Granted Sep 16, 2014·0 cites·19 claims
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