Assignee
SONG GIL HUN
KR·1 granted patent·1 pending application·6 citations·filing 2008–2012
Technology mixH10P2
Top patents by PatentIndex Score
2 records- 0168US8282771B2Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the sameSONG GIL-HUN·Filed 2008·Granted Oct 9, 2012·6 cites·13 claims
- 0234US2013081658A1Apparatus and method for treating substrateSONG GIL HUN·Filed 2012·Application pending·0 cites
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