Assignee
SONG HUA
US·4 granted patents·10 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0180US8423917B2Modeling thin-film stack topography effect on a photolithography processSONG HUA·Filed 2009·Granted Apr 16, 2013·6 cites·23 claims
- 0263US8889535B2Semiconductor device and method for fabricating semiconductor buried layerSONG HUA·Filed 2011·Granted Nov 18, 2014·2 cites·16 claims
- 0361US8132128B2Method and system for performing lithography verification for a double-patterning processSONG HUA·Filed 2008·Granted Mar 6, 2012·2 cites·24 claims
- 0441US8601404B2Modeling EUV lithography shadowing effectSONG HUA·Filed 2012·Granted Dec 3, 2013·0 cites·19 claims
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