Assignee
SONIONMEMS AS
DK3 patents
Top patents by PatentIndex Score
US6732588B1May 11, 2004
Pressure transducer
SONIONMEMS AS138 citations95
US6622368B1Sep 23, 2003
Method of manufacturing a transducer having a diaphragm with a predetermined tension
SONIONMEMS AS23 citations91
US7054460B2May 30, 2006
Micromachined magnetically balanced membrane actuator
SONIONMEMS AS28 citations89