Assignee
SORABJI KHURSHED
US·5 granted patents·121 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0196US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0294US8314371B2Rapid thermal processing chamber with micro-positioning systemSORABJI KHURSHED·Filed 2009·Granted Nov 20, 2012·18 cites·12 claims
- 0393US8227729B2Rapid conductive cooling using a secondary process planeSORABJI KHURSHED·Filed 2010·Granted Jul 24, 2012·12 cites·11 claims
- 0492US8111978B2Rapid thermal processing chamber with shower headSORABJI KHURSHED·Filed 2008·Granted Feb 7, 2012·21 cites·24 claims
- 0591US8658947B2Rapid conductive cooling using a secondary process planeSORABJI KHURSHED·Filed 2012·Granted Feb 25, 2014·8 cites·20 claims
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