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SPC ELECTRONICS

JP2 patents

Top patents by PatentIndex Score

US6129100AOct 10, 2000

Wafer cleaning apparatus and structure for holding and transferring wafer used in wafer cleaning apparatus

SPC ELECTRONICS20 citations86

US6616774B2Sep 9, 2003

Wafer cleaning device and tray for use in wafer cleaning device

SPC ELECTRONICS7 citations65