Assignee

SPEEDFAM CLEAN SYSTEM COMPANY

JP·2 granted patents·75 citations·filing 1991–1993

Technology mixA47L1 D06F1 F26B1 G05D1

Top patents by PatentIndex Score

2 records

0187US5370743AMethods for controlling the concentration of detergentsSPEEDFAM CLEAN SYSTEM COMPANY·Filed 1993·Granted Dec 6, 1994·60 cites·3 claims
0250US5263264AMethod and apparatus for drying wet workSPEEDFAM CLEAN SYSTEM COMPANY·Filed 1991·Granted Nov 23, 1993·15 cites·17 claims

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