Assignee
SPEEDFAM COMPANY LIMITED
JP3 patents
Top patents by PatentIndex Score
US5605499AFeb 25, 1997
Flattening method and flattening apparatus of a semiconductor device
SPEEDFAM COMPANY LIMITED71 citations94
US6048259AApr 11, 2000
Wafer loading and unloading mechanism for loading robot
SPEEDFAM COMPANY LIMITED66 citations89
US5645472AJul 8, 1997
Polishing device
SPEEDFAM COMPANY LIMITED28 citations89