Assignee
SPEEDFAM CORP
US50 patents
Top patents by PatentIndex Score
US5872633AFeb 16, 1999
Methods and apparatus for detecting removal of thin film layers during planarization
SPEEDFAM CORP390 citations98
US5695392ADec 9, 1997
Polishing device with improved handling of fluid polishing media
SPEEDFAM CORP160 citations98
US5569062AOct 29, 1996
Polishing pad conditioning
SPEEDFAM CORP156 citations98
US5486131AJan 23, 1996
Device for conditioning polishing pads
SPEEDFAM CORP212 citations98
US5916015AJun 29, 1999
Wafer carrier for semiconductor wafer polishing machine
SPEEDFAM CORP107 citations97
US5329732AJul 19, 1994
Wafer polishing method and apparatus
SPEEDFAM CORP262 citations97
US5498199AMar 12, 1996
Wafer polishing method and apparatus
SPEEDFAM CORP198 citations96
US4519168AMay 28, 1985
Liquid waxless fixturing of microsize wafers
SPEEDFAM CORP80 citations96
US5733171AMar 31, 1998
Apparatus for the in-process detection of workpieces in a CMP environment
SPEEDFAM CORP71 citations95
US5498196AMar 12, 1996
Wafer polishing method and apparatus
SPEEDFAM CORP72 citations94
US5993293ANov 30, 1999
Method and apparatus for improved semiconductor wafer polishing
SPEEDFAM CORP24 citations92
US5972162AOct 26, 1999
Wafer polishing with improved end point detection
SPEEDFAM CORP41 citations92
US5954888ASep 21, 1999
Post-CMP wet-HF cleaning station
SPEEDFAM CORP28 citations92
US5868605AFeb 9, 1999
In-situ polishing pad flatness control
SPEEDFAM CORP53 citations92
US5857893AJan 12, 1999
Methods and apparatus for measuring and dispensing processing solutions to a CMP machine
SPEEDFAM CORP78 citations92
US5823853AOct 20, 1998
Apparatus for the in-process detection of workpieces with a monochromatic light source
SPEEDFAM CORP36 citations92
US5769691AJun 23, 1998
Methods and apparatus for the chemical mechanical planarization of electronic devices
SPEEDFAM CORP31 citations92
US5224304AJul 6, 1993
Automated free abrasive machine for one side piece part machining
SPEEDFAM CORP27 citations92
US4270314AJun 2, 1981
Bearing mount for lapping machine pressure plate
SPEEDFAM CORP43 citations92
US5791975AAug 11, 1998
Backing pad
SPEEDFAM CORP46 citations91
US5685766ANov 11, 1997
Polishing control method
SPEEDFAM CORP55 citations91
US5274960AJan 4, 1994
Uniform velocity double sided finishing machine
SPEEDFAM CORP30 citations91
US5899216AMay 4, 1999
Apparatus for rinsing wafers in the context of a combined cleaning rinsing and drying system
SPEEDFAM CORP31 citations90
US5803798ASep 8, 1998
Dual column abrading machine
SPEEDFAM CORP17 citations90
US5782678AJul 21, 1998
Dual column abrading machine
SPEEDFAM CORP23 citations90
US5762543AJun 9, 1998
Polishing apparatus with improved product unloading
SPEEDFAM CORP19 citations90
US5595529AJan 21, 1997
Dual column abrading machine
SPEEDFAM CORP36 citations90
US6030280AFeb 29, 2000
Apparatus for holding workpieces during lapping, honing, and polishing
SPEEDFAM CORP33 citations89
US6001005ADec 14, 1999
Polishing apparatus
SPEEDFAM CORP18 citations88
US5957763ASep 28, 1999
Polishing apparatus with support columns supporting multiple platform members
SPEEDFAM CORP20 citations88
US5997390ADec 7, 1999
Polishing apparatus with improved alignment of polishing plates
SPEEDFAM CORP17 citations87
US5975094ANov 2, 1999
Method and apparatus for enhanced cleaning of a workpiece with mechanical energy
SPEEDFAM CORP45 citations86
US5870792AFeb 16, 1999
Apparatus for cleaning wafers and discs
SPEEDFAM CORP19 citations86
US5842912ADec 1, 1998
Apparatus for conditioning polishing pads utilizing brazed diamond technology
SPEEDFAM CORP38 citations86
US5134807AAug 4, 1992
Multilevel grinding apparatus
SPEEDFAM CORP22 citations83
US6555466B1Apr 29, 2003
Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers
SPEEDFAM CORP17 citations82
US4693012ASep 15, 1987
Measuring bar for free abrasive machines
SPEEDFAM CORP21 citations82
US4593716AJun 10, 1986
Control valve assembly for abrasive slurry
SPEEDFAM CORP18 citations74
US5885312AMar 23, 1999
Grinding composition using abrasive particles on bubbles
SPEEDFAM CORP10 citations73
US5187901AFeb 23, 1993
Circumferential pattern finishing machine
SPEEDFAM CORP8 citations72
US5123218AJun 23, 1992
Circumferential pattern finishing method
SPEEDFAM CORP19 citations72
US5791978AAug 11, 1998
Bearing assembly for wafer planarization carrier
SPEEDFAM CORP12 citations71
US5436045AJul 25, 1995
Low abraision material comprising a fibrous matrix impregnated with a polyurethane resin wherein fiber ends are exposed on at least one surface of the material
SPEEDFAM CORP8 citations70
US5834645ANov 10, 1998
Methods and apparatus for the in-process detection of workpieces with a physical contact probe
SPEEDFAM CORP12 citations67
US5921849AJul 13, 1999
Method and apparatus for distributing a polishing agent onto a polishing element
SPEEDFAM CORP14 citations66
US4047639ASep 13, 1977
Abrasive slurry regulator assembly
SPEEDFAM CORP3 citations58
US3991918ANov 16, 1976
Abrasive slurry regulator assembly
SPEEDFAM CORP2 citations58
US5713968AFeb 3, 1998
Abrasive foam grinding composition
SPEEDFAM CORP6 citations57
US4047640ASep 13, 1977
Abrasive slurry regulator assembly
SPEEDFAM CORP1 citations48
US4821459AApr 18, 1989
Multilevel grinding apparatus and method
SPEEDFAM CORP0 citations42