Assignee
SPEEDFAM IPEC CORP
US147 patents
Top patents by PatentIndex Score
US6736952B2May 18, 2004
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP155 citations98
US6659850B2Dec 9, 2003
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP97 citations98
US6618130B2Sep 9, 2003
Method and apparatus for optical endpoint detection during chemical mechanical polishing
SPEEDFAM IPEC CORP75 citations98
US6390905B1May 21, 2002
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP137 citations98
US6371838B1Apr 16, 2002
Polishing pad conditioning device with cutting elements
SPEEDFAM IPEC CORP107 citations98
US6143155ANov 7, 2000
Method for simultaneous non-contact electrochemical plating and planarizing of semiconductor wafers using a bipiolar electrode assembly
SPEEDFAM IPEC CORP265 citations98
US7140956B1Nov 28, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP67 citations97
US6676482B2Jan 13, 2004
Learning method and apparatus for predictive determination of endpoint during chemical mechanical planarization using sparse sampling
SPEEDFAM IPEC CORP83 citations96
US6361646B1Mar 26, 2002
Method and apparatus for endpoint detection for chemical mechanical polishing
SPEEDFAM IPEC CORP185 citations96
US6106662AAug 22, 2000
Method and apparatus for endpoint detection for chemical mechanical polishing
SPEEDFAM IPEC CORP197 citations96
US6021791AFeb 8, 2000
Method and apparatus for immersion cleaning of semiconductor devices
SPEEDFAM IPEC CORP115 citations96
US5950327ASep 14, 1999
Methods and apparatus for cleaning and drying wafers
SPEEDFAM IPEC CORP418 citations96
US6612903B2Sep 2, 2003
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP40 citations95
US6520839B1Feb 18, 2003
Load and unload station for semiconductor wafers
SPEEDFAM IPEC CORP51 citations95
US6515493B1Feb 4, 2003
Method and apparatus for in-situ endpoint detection using electrical sensors
SPEEDFAM IPEC CORP56 citations95
US6464855B1Oct 15, 2002
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP74 citations95
US6447368B1Sep 10, 2002
Carriers with concentric balloons supporting a diaphragm
SPEEDFAM IPEC CORP62 citations95
US6354927B1Mar 12, 2002
Micro-adjustable wafer retaining apparatus
SPEEDFAM IPEC CORP53 citations95
US6290584B1Sep 18, 2001
Workpiece carrier with segmented and floating retaining elements
SPEEDFAM IPEC CORP58 citations95
US6227946B1May 8, 2001
Robot assisted method of polishing, cleaning and drying workpieces
SPEEDFAM IPEC CORP42 citations95
US6113468ASep 5, 2000
Wafer planarization carrier having floating pad load ring
SPEEDFAM IPEC CORP75 citations95
US5974681ANov 2, 1999
Apparatus for spin drying a workpiece
SPEEDFAM IPEC CORP50 citations95
US5961369AOct 5, 1999
Methods for the in-process detection of workpieces with a monochromatic light source
SPEEDFAM IPEC CORP61 citations95
US6685537B1Feb 3, 2004
Polishing pad window for a chemical mechanical polishing tool
SPEEDFAM IPEC CORP56 citations94
US6292708B1Sep 18, 2001
Distributed control system for a semiconductor wafer processing machine
SPEEDFAM IPEC CORP62 citations94
US6227950B1May 8, 2001
Dual purpose handoff station for workpiece polishing machine
SPEEDFAM IPEC CORP67 citations94
US6213853B1Apr 10, 2001
Integral machine for polishing, cleaning, rinsing and drying workpieces
SPEEDFAM IPEC CORP58 citations94
US6056632AMay 2, 2000
Semiconductor wafer polishing apparatus with a variable polishing force wafer carrier head
SPEEDFAM IPEC CORP202 citations94
US5989104ANov 23, 1999
Workpiece carrier with monopiece pressure plate and low gimbal point
SPEEDFAM IPEC CORP54 citations94
US6491569B2Dec 10, 2002
Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP
SPEEDFAM IPEC CORP55 citations93
US6309279B1Oct 30, 2001
Arrangements for wafer polishing
SPEEDFAM IPEC CORP64 citations93
US7033464B2Apr 25, 2006
Apparatus for electrochemically depositing a material onto a workpiece surface
SPEEDFAM IPEC CORP23 citations92
US6878039B2Apr 12, 2005
Polishing pad window for a chemical-mechanical polishing tool
SPEEDFAM IPEC CORP20 citations92
US6852007B1Feb 8, 2005
Robotic method of transferring workpieces to and from workstations
SPEEDFAM IPEC CORP20 citations92
US6793565B1Sep 21, 2004
Orbiting indexable belt polishing station for chemical mechanical polishing
SPEEDFAM IPEC CORP23 citations92
US6582277B2Jun 24, 2003
Method for controlling a process in a multi-zonal apparatus
SPEEDFAM IPEC CORP23 citations92
US6572755B2Jun 3, 2003
Method and apparatus for electrochemically depositing a material onto a workpiece surface
SPEEDFAM IPEC CORP33 citations92
US6549279B2Apr 15, 2003
Method and apparatus for optical endpoint calibration in CMP
SPEEDFAM IPEC CORP37 citations92
US6540592B1Apr 1, 2003
Carrier head with reduced moment wear ring
SPEEDFAM IPEC CORP29 citations92
US6500055B1Dec 31, 2002
Oscillating orbital polisher and method
SPEEDFAM IPEC CORP21 citations92
US6363623B1Apr 2, 2002
Apparatus and method for spinning a work piece
SPEEDFAM IPEC CORP47 citations92
US6347981B1Feb 19, 2002
Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride
SPEEDFAM IPEC CORP17 citations92
US6347982B1Feb 19, 2002
Method for making a polishing apparatus utilizing brazed diamond technology and titanium nitride
SPEEDFAM IPEC CORP19 citations92
US6288357B1Sep 11, 2001
Ion milling planarization of semiconductor workpieces
SPEEDFAM IPEC CORP47 citations92
US6264540B1Jul 24, 2001
Method and apparatus for disposable bladder carrier assembly
SPEEDFAM IPEC CORP22 citations92
US6258711B1Jul 10, 2001
Sacrificial deposit to improve damascene pattern planarization in semiconductor wafers
SPEEDFAM IPEC CORP42 citations92
US6213855B1Apr 10, 2001
Self-powered carrier for polishing or planarizing wafers
SPEEDFAM IPEC CORP32 citations92
US6184139B1Feb 6, 2001
Oscillating orbital polisher and method
SPEEDFAM IPEC CORP33 citations92
US6168683B1Jan 2, 2001
Apparatus and method for the face-up surface treatment of wafers
SPEEDFAM IPEC CORP21 citations92
US6142857ANov 7, 2000
Wafer polishing with improved backing arrangement
SPEEDFAM IPEC CORP23 citations92
Showing the top 50 of 147 patents by PatentIndex Score.