Assignee
SPP TECH CO LTD
JP·5 granted patents·8 pending applications·3 citations·filing 2014–2024
Top patents by PatentIndex Score
13 records- 0179US11195697B2Plasma control apparatusSPP TECH CO LTD·Filed 2017·Granted Dec 7, 2021·3 cites·2 claims
- 0262US2024395515A1Substrate Processing ApparatusSPP TECH CO LTD·Filed 2024·Application pending·0 cites
- 0347US2022416021A1Wide-gap semiconductor substrate, apparatus for manufacturing wide-gap semiconductor substrate, and method for manufacturing wide-gap semiconductor substrateSPP TECH CO LTD·Filed 2022·Application pending·0 cites
- 0445US10280084B2Silicon nitride film and method of making thereofSPP TECH CO LTD·Filed 2014·Granted May 7, 2019·0 cites·8 claims
- 0544US2016358748A1Plasma Processing Apparatus and Coil Used ThereinSPP TECH CO LTD·Filed 2014·Application pending·0 cites
- 0643US11393664B2Substrate placing table, plasma processing apparatus provided with same, and plasma processing methodSPP TECH CO LTD·Filed 2019·Granted Jul 19, 2022·0 cites·6 claims
- 0743US2022114484A1Production process determination device for substrate processing apparatus, substrate processing system, production process determination method for substrate processing apparatus, learning model group, generation method of learning model group, and programSPP TECH CO LTD·Filed 2020·Application pending·0 cites
- 0841US2020127090A1Wide-Gap Semiconductor Substrate, Apparatus For Manufacturing Wide-Gap Semiconductor Substrate, And Method For Manufacturing Wide-Gap Semiconductor SubstrateSPP TECH CO LTD·Filed 2018·Application pending·0 cites
- 0940US2022115211A1Method of igniting plasma and plasma generating systemSPP TECH CO LTD·Filed 2019·Application pending·0 cites
- 1039US2021366750A1Abnormality detection apparatusSPP TECH CO LTD·Filed 2020·Application pending·0 cites
- 1136US2023230810A1Plasma processing gas, plasma processing method, and plasma processing apparatusSPP TECH CO LTD·Filed 2020·Application pending·0 cites
- 1234US11785184B2Maintenance support system, maintenance support method, and programSPP TECH CO LTD·Filed 2019·Granted Oct 10, 2023·0 cites·12 claims
- 1330US12243210B2Maintenance support system, maintenance support method, program, method for generating processed image, and processed imageSPP TECH CO LTD·Filed 2020·Granted Mar 4, 2025·0 cites·10 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →