Assignee

SPSGLOBAL CO LTD

KR·1 granted patent·1 pending application·0 citations·filing 2021–2021

Technology mixG01M2 G06N2 G06Q2 G08C1 H01L1 H10P1

Top patents by PatentIndex Score

2 records

0148US12334371B2Remote monitoring apparatus for air valve for semiconductor equipmentSPSGLOBAL CO LTD·Filed 2021·Granted Jun 17, 2025·0 cites·8 claims
0246US2023128369A1Device for inspecting semiconductor equipment air valve for leakingSPSGLOBAL CO LTD·Filed 2021·Application pending·0 cites

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