Assignee
SRIVASTAVA ASEEM K
US·2 granted patents·1 pending application·22 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0195US8932430B2RF coupled plasma abatement system comprising an integrated power oscillatorSRIVASTAVA ASEEM K·Filed 2011·Granted Jan 13, 2015·22 cites·18 claims
- 0252US8906195B2Tuning hardware for plasma ashing apparatus and methods of use thereofSRIVASTAVA ASEEM K·Filed 2009·Granted Dec 9, 2014·0 cites·15 claims
- 0340US2013160793A1Plasma generating apparatus and process for simultaneous exposure of a workpiece to electromagnetic radiation and plasmaSRIVASTAVA ASEEM K·Filed 2011·Application pending·0 cites
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