Assignee
STAALS FRANK
NL6 patents
Top patents by PatentIndex Score
US8208122B2Jun 26, 2012
Method of measuring a lithographic projection apparatus
STAALS FRANK7 citations82
US8582082B2Nov 12, 2013
Method and lithographic apparatus for measuring and acquiring height data relating to a substrate surface
STAALS FRANK8 citations78
US8947632B2Feb 3, 2015
Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate
STAALS FRANK5 citations72
US8554510B2Oct 8, 2013
Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product
STAALS FRANK5 citations71
US9329500B2May 3, 2016
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor
STAALS FRANK0 citations51
US8975599B2Mar 10, 2015
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
STAALS FRANK1 citations51