Assignee
STAVENGA MARCO KOERT
NL·4 granted patents·11 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0185US9059228B2Substrate table, immersion lithographic apparatus and device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Jun 16, 2015·6 cites·22 claims
- 0278US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 0363US8817227B2Immersion lithography apparatusSTAVENGA MARCO KOERT·Filed 2008·Granted Aug 26, 2014·1 cites·23 claims
- 0453US8902404B2Lithographic apparatus and device manufacturing methodSTAVENGA MARCO KOERT·Filed 2011·Granted Dec 2, 2014·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when STAVENGA MARCO KOERT files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →