Assignee
STEAG AST
DE·5 granted patents·176 citations·filing 1997–2001
Top patents by PatentIndex Score
5 records- 0184US6369363B2Method of measuring electromagnetic radiationSTEAG AST·Filed 2001·Granted Apr 9, 2002·30 cites·5 claims
- 0279US5872889AApparatus and method for rapid thermal processingSTEAG AST·Filed 1997·Granted Feb 16, 1999·54 cites·16 claims
- 0372US5965047ARapid thermal processing (RTP) system with rotating substrateSTEAG AST·Filed 1997·Granted Oct 12, 1999·51 cites·22 claims
- 0460US5870526AInflatable elastomeric element for rapid thermal processing (RTP) systemSTEAG AST·Filed 1997·Granted Feb 9, 1999·28 cites·21 claims
- 0548US6462315B2Optical radiation measurement apparatusSTEAG AST·Filed 1998·Granted Oct 8, 2002·13 cites·28 claims
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