Assignee
STEAG RTP SYSTEMS INC
US·17 granted patents·1,699 citations·filing 1996–2000
Top patents by PatentIndex Score
17 records- 0196US6281141B1Process for forming thin dielectric layers in semiconductor devicesSTEAG RTP SYSTEMS INC·Filed 1999·Granted Aug 28, 2001·553 cites·16 claims
- 0291US6160242AApparatus and process for measuring the temperature of semiconductor wafers in the presence of radiation absorbing gasesSTEAG RTP SYSTEMS INC·Filed 2000·Granted Dec 12, 2000·71 cites·17 claims
- 0391US6056434AApparatus and method for determining the temperature of objects in thermal processing chambersSTEAG RTP SYSTEMS INC·Filed 1998·Granted May 2, 2000·123 cites·27 claims
- 0490US6200023B1Method for determining the temperature in a thermal processing chamberSTEAG RTP SYSTEMS INC·Filed 1999·Granted Mar 13, 2001·92 cites·35 claims
- 0590US6174651B1Method for depositing atomized materials onto a substrate utilizing light exposure for heatingSTEAG RTP SYSTEMS INC·Filed 1999·Granted Jan 16, 2001·75 cites·29 claims
- 0686US6027244AApparatus for determining the temperature of a semi-transparent radiating bodySTEAG RTP SYSTEMS INC·Filed 1997·Granted Feb 22, 2000·94 cites·28 claims
- 0785US6293696B1System and process for calibrating pyrometers in thermal processing chambersSTEAG RTP SYSTEMS INC·Filed 1999·Granted Sep 25, 2001·93 cites·19 claims
- 0885US6204484B1System for measuring the temperature of a semiconductor wafer during thermal processingSTEAG RTP SYSTEMS INC·Filed 1998·Granted Mar 20, 2001·76 cites·22 claims
- 0985US5997175AMethod for determining the temperature of a semi-transparent radiating bodySTEAG RTP SYSTEMS INC·Filed 1999·Granted Dec 7, 1999·84 cites·8 claims
- 1084US6514876B1Pre-metal dielectric rapid thermal processing for sub-micron technologySTEAG RTP SYSTEMS INC·Filed 2000·Granted Feb 4, 2003·48 cites·34 claims
- 1183US6359263B2System for controlling the temperature of a reflective substrate during rapid heatingSTEAG RTP SYSTEMS INC·Filed 1999·Granted Mar 19, 2002·69 cites·15 claims
- 1283US6210484B1Heating device containing a multi-lamp cone for heating semiconductor wafersSTEAG RTP SYSTEMS INC·Filed 1998·Granted Apr 3, 2001·77 cites·34 claims
- 1383US6034357AApparatus and process for measuring the temperature of semiconductor wafers in the presence of radiation absorbing gasesSTEAG RTP SYSTEMS INC·Filed 1998·Granted Mar 7, 2000·70 cites·11 claims
- 1480US6075922AProcess for preventing gas leaks in an atmospheric thermal processing chamberSTEAG RTP SYSTEMS INC·Filed 1997·Granted Jun 13, 2000·68 cites·26 claims
- 1580US5980637ASystem for depositing a material on a substrate using light energySTEAG RTP SYSTEMS INC·Filed 1996·Granted Nov 9, 1999·59 cites·28 claims
- 1676USD416167SElectric grillSTEAG RTP SYSTEMS INC·Filed 1997·Granted Nov 9, 1999·20 cites·1 claims
- 1761US6221766B1Method and apparatus for processing refractory metals on semiconductor substratesSTEAG RTP SYSTEMS INC·Filed 1999·Granted Apr 24, 2001·27 cites·8 claims
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