Assignee
STEIMLE ROBERT F
US·3 granted patents·5 citations·filing 2012–2014
Top patents by PatentIndex Score
3 records- 0182US9463976B2MEMS fabrication process with two cavities operating at different pressuresSTEIMLE ROBERT F·Filed 2014·Granted Oct 11, 2016·4 cites·20 claims
- 0268US9290380B2Reducing MEMS stiction by deposition of nanoclustersSTEIMLE ROBERT F·Filed 2012·Granted Mar 22, 2016·1 cites·8 claims
- 0350US9434602B2Reducing MEMS stiction by deposition of nanoclustersSTEIMLE ROBERT F·Filed 2014·Granted Sep 6, 2016·0 cites·16 claims
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