Assignee
STRAAIJER ALEXANDER
NL5 patents
Top patents by PatentIndex Score
US8797554B2Aug 5, 2014
Determining a structural parameter and correcting an asymmetry property
STRAAIJER ALEXANDER83 citations98
US8792096B2Jul 29, 2014
Inspection apparatus for lithography
STRAAIJER ALEXANDER63 citations98
US8692994B2Apr 8, 2014
Inspection method and apparatus, and associated computer readable product
STRAAIJER ALEXANDER61 citations98
US8681312B2Mar 25, 2014
Inspection apparatus for lithography
STRAAIJER ALEXANDER62 citations98
US8115926B2Feb 14, 2012
Inspection method and apparatus, lithographic apparatus, lithographic processing cell, and device manufacturing method to measure a property of a substrate
STRAAIJER ALEXANDER67 citations98