Assignee
STRASBAUGH
US64 patents
Top patents by PatentIndex Score
US6551179B1Apr 22, 2003
Hard polishing pad for chemical mechanical planarization
STRASBAUGH80 citations98
US6520843B1Feb 18, 2003
High planarity chemical mechanical planarization
STRASBAUGH111 citations98
US7249992B2Jul 31, 2007
Method, apparatus and system for use in processing wafers
STRASBAUGH77 citations94
US5964646AOct 12, 1999
Grinding process and apparatus for planarizing sawed wafers
STRASBAUGH76 citations94
US5961169AOct 5, 1999
Apparatus for sensing the presence of a wafer
STRASBAUGH76 citations93
US6855030B2Feb 15, 2005
Modular method for chemical mechanical planarization
STRASBAUGH20 citations92
US6692339B1Feb 17, 2004
Combined chemical mechanical planarization and cleaning
STRASBAUGH21 citations92
US6629874B1Oct 7, 2003
Feature height measurement during CMP
STRASBAUGH37 citations92
US6602121B1Aug 5, 2003
Pad support apparatus for chemical mechanical planarization
STRASBAUGH31 citations92
US6547651B1Apr 15, 2003
Subaperture chemical mechanical planarization with polishing pad conditioning
STRASBAUGH26 citations92
US6517419B1Feb 11, 2003
Shaping polishing pad for small head chemical mechanical planarization
STRASBAUGH21 citations92
US6514129B1Feb 4, 2003
Multi-action chemical mechanical planarization device and method
STRASBAUGH21 citations92
US6511368B1Jan 28, 2003
Spherical drive assembly for chemical mechanical planarization
STRASBAUGH22 citations92
US6464574B1Oct 15, 2002
Pad quick release device for chemical mechanical planarization
STRASBAUGH20 citations92
US6346036B1Feb 12, 2002
Multi-pad apparatus for chemical mechanical planarization
STRASBAUGH34 citations92
US6227956B1May 8, 2001
Pad quick release device for chemical mechanical polishing
STRASBAUGH30 citations92
US7008309B2Mar 7, 2006
Back pressure control system for CMP and wafer polishing
STRASBAUGH15 citations91
US6743722B2Jun 1, 2004
Method of spin etching wafers with an alkali solution
STRASBAUGH25 citations91
US6485354B1Nov 26, 2002
Polishing pad with built-in optical sensor
STRASBAUGH26 citations91
US6102057AAug 15, 2000
Lifting and rinsing a wafer
STRASBAUGH25 citations91
US6045716AApr 4, 2000
Chemical mechanical polishing apparatus and method
STRASBAUGH59 citations91
US6976901B1Dec 20, 2005
In situ feature height measurement
STRASBAUGH21 citations90
US6869348B1Mar 22, 2005
Retaining ring for wafer carriers
STRASBAUGH16 citations89
US6739945B2May 25, 2004
Polishing pad with built-in optical sensor
STRASBAUGH19 citations89
US6726528B2Apr 27, 2004
Polishing pad with optical sensor
STRASBAUGH19 citations88
US7033252B2Apr 25, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH23 citations87
US6885206B2Apr 26, 2005
Device for supporting thin semiconductor wafers
STRASBAUGH15 citations84
US6527621B1Mar 4, 2003
Pad retrieval apparatus for chemical mechanical planarization
STRASBAUGH18 citations84
US7551979B2Jun 23, 2009
Robot calibration system and method
STRASBAUGH8 citations82
US7160808B2Jan 9, 2007
Chuck for supporting wafers with a fluid
STRASBAUGH12 citations82
US6696005B2Feb 24, 2004
Method for making a polishing pad with built-in optical sensor
STRASBAUGH15 citations82
US6638389B2Oct 28, 2003
Method for applying an insert or tape to chucks or wafer carriers used for grinding, polishing, or planarizing wafers
STRASBAUGH13 citations82
US7959496B2Jun 14, 2011
Flexible membrane assembly for a CMP system and method of using
STRASBAUGH14 citations81
US7018268B2Mar 28, 2006
Protection of work piece during surface processing
STRASBAUGH13 citations80
US8052504B2Nov 8, 2011
Method, apparatus and system for use in processing wafers
STRASBAUGH12 citations79
US6945856B2Sep 20, 2005
Subaperture chemical mechanical planarization with polishing pad conditioning
STRASBAUGH6 citations74
US6887133B1May 3, 2005
Pad support method for chemical mechanical planarization
STRASBAUGH9 citations74
US6514121B1Feb 4, 2003
Polishing chemical delivery for small head chemical mechanical planarization
STRASBAUGH12 citations74
US6495463B2Dec 17, 2002
Method for chemical mechanical polishing
STRASBAUGH9 citations74
US8968052B2Mar 3, 2015
Systems and methods of wafer grinding
STRASBAUGH6 citations72
US7195541B2Mar 27, 2007
Endpoint detection system for wafer polishing
STRASBAUGH6 citations72
US7059942B2Jun 13, 2006
Method of backgrinding wafers while leaving backgrinding tape on a chuck
STRASBAUGH8 citations72
US7052366B2May 30, 2006
Endpoint detection system for wafer polishing
STRASBAUGH9 citations72
US6866564B2Mar 15, 2005
Method of backgrinding wafers while leaving backgrinding tape on a chuck
STRASBAUGH6 citations72
US6695681B2Feb 24, 2004
Endpoint detection system for wafer polishing
STRASBAUGH7 citations72
US7063604B2Jun 20, 2006
Independent edge control for CMP carriers
STRASBAUGH7 citations71
US6884150B2Apr 26, 2005
Polishing pad sensor assembly with a damping pad
STRASBAUGH10 citations69
US9393669B2Jul 19, 2016
Systems and methods of processing substrates
STRASBAUGH5 citations68
US6450860B1Sep 17, 2002
Pad transfer apparatus for chemical mechanical planarization
STRASBAUGH6 citations63
US7235154B2Jun 26, 2007
Devices and methods for optical endpoint detection during semiconductor wafer polishing
STRASBAUGH6 citations62
Showing the top 50 of 64 patents by PatentIndex Score.