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STREEFKERK BOB
NL26 patents
Top patents by PatentIndex Score
US8634056B2Jan 21, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB10 citations92
US8547519B2Oct 1, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB8 citations84
US8587762B2Nov 19, 2013
Methods relating to immersion lithography and an immersion lithographic apparatus
STREEFKERK BOB15 citations83
US8248577B2Aug 21, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB9 citations83
US8115903B2Feb 14, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB5 citations74
US9104117B2Aug 11, 2015
Lithographic apparatus having a liquid detection system
STREEFKERK BOB2 citations63
US8913223B2Dec 16, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB2 citations63
US8823920B2Sep 2, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB2 citations63
US8553201B2Oct 8, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB2 citations63
US8860924B2Oct 14, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB1 citations62
US8330936B2Dec 11, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB3 citations62
US9229335B2Jan 5, 2016
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US9146478B2Sep 29, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US9081300B2Jul 14, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8964164B2Feb 24, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8749754B2Jun 10, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724083B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724084B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8711323B2Apr 29, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8638415B2Jan 28, 2014
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets
STREEFKERK BOB0 citations52
US8400615B2Mar 19, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8319939B2Nov 27, 2012
Immersion lithographic apparatus and device manufacturing method detecting residual liquid
STREEFKERK BOB0 citations52
US8102507B2Jan 24, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8711330B2Apr 29, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations51
US8472006B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations51
US8416385B2Apr 9, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations50