Assignee

SUBRAMONIUM PRAMOD

US·2 granted patents·111 citations·filing 2008–2008

Technology mixC23C2 H10P2

Top patents by PatentIndex Score

2 records

0195US8435608B1Methods of depositing smooth and conformal ashable hard mask filmsSUBRAMONIUM PRAMOD·Filed 2008·Granted May 7, 2013·62 cites·20 claims
0295US8110493B1Pulsed PECVD method for modulating hydrogen content in hard maskSUBRAMONIUM PRAMOD·Filed 2008·Granted Feb 7, 2012·49 cites·22 claims

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