Assignee
SUKEGAWA TAKASHI
JP·3 granted patents·2 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0159US8098927B2Imaging characteristics fluctuation predicting method, exposure apparatus, and device manufacturing methodSUKEGAWA TAKASHI·Filed 2008·Granted Jan 17, 2012·1 cites·5 claims
- 0256US9201179B2Method of manufacturing blazed diffractive grating and method of manufacturing mold for manufacturing blazed diffractive gratingSUKEGAWA TAKASHI·Filed 2011·Granted Dec 1, 2015·1 cites·8 claims
- 0350US9678253B2Manufacturing method of diffraction gratingSUKEGAWA TAKASHI·Filed 2011·Granted Jun 13, 2017·0 cites·11 claims
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