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SULZBACH THOMAS

DE2 patents

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US8209768B2Jun 26, 2012

Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip

SULZBACH THOMAS0 citations39
US8810110B2Aug 19, 2014

Micro-mechanical component with cantilever integrated electrical functional element

SULZBACH THOMAS0 citations38